发明名称 VAPOR DEPOSITION MASK FOR ORGANIC EL
摘要 PROBLEM TO BE SOLVED: To solve the problems that a light emitting material is scratched due to the touch of the light emitting material adhering to a basic body with a mask and precise matching of a mask and the cathode is difficult. SOLUTION: After the light emitting material having a plurality of colors adheres by a second mask through a first mask arranged so as to adhere to the basic body closely, the second mask is removed, and a pattern of a back face electrode adheres by the first mask. Since the second mask used to adhere a plurality of times by moving does not come into direct touch with the organic light emitting material, a scratch does not occur, mask matching becomes easy, a back face electrode mask by the first mask is fixed to dispense with new mask matching, and a process becomes simple.
申请公布号 JP2003077654(A) 申请公布日期 2003.03.14
申请号 JP20010265618 申请日期 2001.09.03
申请人 WAKABAYASHI MORIMITSU 发明人 WAKABAYASHI MORIMITSU
分类号 H05B33/10;C23C14/04;G09F9/00;G09F9/30;H01L27/32;H01L51/50;H05B33/12;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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