发明名称 ORGANIC EL ELEMENT AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide manufacturing technique for an organic EL element capable of forming a barrier having high film quality by small number of processes. SOLUTION: This organic EL element according to this invention has a barrier 16 for separating a predetermined cathode, and this barrier 16 is made of polyimide film containing fluorine formed by vapor deposition polymerization. The polyimide film contains fluorine of 20 to 40 wt.%. As the raw material monomer for vapor deposition polymerization, monomer having substituent containing fluorine is used.
申请公布号 JP2003077678(A) 申请公布日期 2003.03.14
申请号 JP20010263989 申请日期 2001.08.31
申请人 ULVAC JAPAN LTD 发明人 UKISHIMA YOSHIYUKI;ITO MASAHIRO;RI KETSUKI;ICHINOHE YUJI;KOMATSU TAKASHI
分类号 H05B33/22;H01L27/32;H01L51/50;H05B33/10;H05B33/12;(IPC1-7):H05B33/22;H05B33/14 主分类号 H05B33/22
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