发明名称 DIVIDED EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a divided exposure device whose external size is not made large and which does not cause the cost rise of a driving device for moving a shutter. SOLUTION: One end of the shutter 1 is fixed on a frame 13c and the other end of the shutter 1 is fixed on a Y-direction moving device 12 in an area between the device 12 and the frame 13c. The shutter 1 has structure that two plate members 2 and 3 arranged in a direction X are coupled in a bellows state by a hinge 17 so as to mutually rotate. Then, one end side of the member 3 and the device 12, and also the other end side of the member 2 and the frame 13c are coupled by the hinges 17 so as to mutually rotate.
申请公布号 JP2003076027(A) 申请公布日期 2003.03.14
申请号 JP20010269685 申请日期 2001.09.06
申请人 SANEE GIKEN KK 发明人 MIYAKE EIICHI
分类号 G03F7/20;G03F9/00;H05K3/00;(IPC1-7):G03F7/20 主分类号 G03F7/20
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