发明名称 CARRYING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To protect plate-like objects from being damaged respectively even in the case that sizes of the workpieces are various in the case that the thin workpieces are held and carried. SOLUTION: A carrying device 40 for sucking, holding and carrying the workpieces is composed of a suction part 43 provided with a suction area 52 sucking and holding the workpieces, an arm part 42 connecting the suction part 43 and moving the suction part 43, and a suction source for supplying suction force to the suction area 52 at the lowest. The suction part 43 and the arm part 42 are detachably constituted, a plurality of the suction parts 43 corresponding to sizes of the workpieces are prepared, and all faces of the workpieces are always held by attaching and using the suction parts matched with the sizes of the workpieces.</p>
申请公布号 JP2003077982(A) 申请公布日期 2003.03.14
申请号 JP20010269270 申请日期 2001.09.05
申请人 DISCO ABRASIVE SYST LTD 发明人 SHINOYAMA HIROSHI
分类号 B25J15/04;B24B37/04;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B25J15/04
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