发明名称 NITRIDE SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a GaN semiconductor layer which is made stable in a vertical lateral mode by improving it in light trapping properties. SOLUTION: An N-Al0.07 Ga0.93 N first clad layer, an active layer, and a P- Al0.07 Ga0.93 N second clad layer, are laminated on a substrate. Furthermore, an AlGaN layer whose Al composition is higher than (or equal to) that of the first clad layer is interposed between the first clad layer and the substrate, by which the active layer can be improved in light trapping properties, and cracking is restrained from occurring in crystals.
申请公布号 JP2003078217(A) 申请公布日期 2003.03.14
申请号 JP20020232401 申请日期 2002.08.09
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KIDOGUCHI ISAO;OTSUKA NOBUYUKI;BAN YUZABURO
分类号 H01L21/205;H01S5/323;H01S5/343;(IPC1-7):H01S5/343 主分类号 H01L21/205
代理机构 代理人
主权项
地址