发明名称 |
WIRING STRUCTURE AND ITS DESIGN METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a wiring structure and its design method in which a hollow structure is created as much as possible between the wiring patterns in any wiring pattern. SOLUTION: After two enlarged wiring patterns are created by enlarging a wiring pattern by different specified amounts, the overlapped part is removed to create a dummy pattern. Alternatively, a simple figure pattern comprising a set of simple figures is created and utilized for creating a dummy pattern. A wiring structure having a hollow part between the wiring patterns is realized by defining the area where the gap of a final wiring pattern comprising a wiring pattern and a dummy pattern is not larger than a specified as a hollow part. |
申请公布号 |
JP2003078015(A) |
申请公布日期 |
2003.03.14 |
申请号 |
JP20010271114 |
申请日期 |
2001.09.07 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
HYOTO CHIHIRO;MUKAI KIYOSHI;SHIBATA HIDENORI;TSUJIKAWA HIROYUKI |
分类号 |
G06F17/50;H01L21/3205;H01L21/768;H01L21/82;H01L21/822;H01L23/52;H01L23/522;H01L23/528;H01L27/04;(IPC1-7):H01L21/82;H01L21/320 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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