PROCEDE ET APPAREIL A CONTRASTE DE TENSION POUR INSPECTER DES SEMI-CONDUCTEURS EN UTILISANT UN FAISCEAU DE PARTICULES A BASSE TENSION

摘要

At least an interlaced picture frame of a first surface of a substrate is recorded using charge particles beam. A second surface of the substrate is loaded and imaging its first surface is imaged. The second surface locks up the first surface and that the registered image is compared with a reference in order to identify faults in the checked substrate. The subsystem image processor (66) forms a component of an acquired image processing electronics (80), which includes a control device (82) for the electron-optical column and a video digitizing device (84), an object table control device (86), an interferometer control device (88) for the object table position and the position return beam. A video output stage (90) supplies a picture signal to a control computer (60) for the display as well as a real time control computer (92) with a real-time operating system such as for example VxWorks or similar. An independent claim is included for: (a) a device for determination of faults in structures substrate