CARRYING DEVICE AND CARRYING METHOD OF SEMICONDUCTOR WAFER

摘要

PROBLEM TO BE SOLVED: To provide a carrying device capable of preventing lowering of quality of bodies to be carried. SOLUTION: The carrying device 100 is provided with carrying belts 11 and 12 and rolling bodies 21 and 22 provided rotatably on the surfaces of the carrying belts 11 and 12. A plurality of the rolling bodies 21 and 22 are provided along a carrying direction. The carrying device 100 is provided with holders 23 and 24 provided on the surfaces of the carrying belts 11 and 12 and rotatably holding the rolling bodies 21 and 22. The rolling bodies 21 and 22 are ball shapes.