发明名称 PROCESSING SYSTEM AND PROCESSING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a processing system and processing method capable of processing a workpiece without producing waiting of the workpiece in a processing device. SOLUTION: In the processing system 100 for performing serial processing processed continuously by either of second processing devices CL1 and CL2 in a plurality of the workpieces W after processing is performed by either of first processing devices TF1, TF2 and TF3, a control mechanism 20 has the n second processing devices, second processing is finished from a time point when workpieces W1 before n workpieces W3 intended to the carried to the first processing devices are finished by the first processing devices, in the case that a time until a carrying mechanism 10 carried from the second processing devices is vacant is X, X is previously determined, and carrying to the first processing devices of the workpieces W3 is allowed after X elapse after carrying for carrying the workpieces W1 in the first processing devices.
申请公布号 JP2003077978(A) 申请公布日期 2003.03.14
申请号 JP20010269211 申请日期 2001.09.05
申请人 TOKYO ELECTRON LTD 发明人 MURAOKA SUNAO
分类号 H01L21/677;H01L21/02;H01L21/205;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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