| 摘要 |
After scanning is started in an exposure apparatus, a wafer stage (5) is moved to a position (Ma) at which focus measurement is possible. When an initial focus measurement point (M0) has arrived at the spots (A) to (C) or (a) to (c), a storage cycle of a CCD sensor is initialized at a timing that is asynchronous with respect to a reference signal that is for controlling the wafer stage. As a result, the focus measurement point (M0) and an offset measurement point can be made to agree in a highly precise manner.
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