Backpanel structure of liquid crystal on silicon

摘要

A silicon backpanel structure of a LCOS is described. The present silicon back panel has a cell region and a routing/pad region, wherein the cell region of the silicon backpanel is arranged with a plurality of pixels and an alignment layer is disposed over the silicon backpanel, and the routing/pad region is arranged with a patterned trace and a plurality of routing/pads, and the routings/pads are electrically bonded to the pixels by means of the patterned trace. Furthermore, the patterned trace of the routing/pad regions is mounted with a break protective layer. This break protective layer protects the patterned trace of the routing/pad region from damage by the pressing of the upper transparent substrate in the subsequent breaking stage.