发明名称 Novel epoxy compounds having an alicyclic structure, polymer compounds, resist materials, and patterning methods
摘要 Provided is a novel epoxy compound useful, in photolithography, as a monomer for preparing a photoresist material excellent in transparency and affinity to a substrate. More specifically, provided are an epoxy compound represented by the following formula (1): wherein, R1 and R2 each independently represents a hydrogen atom or a linear, branched or cyclic C1-10 alkyl group in which hydrogen atoms on one or more constituent carbon atoms thereof may be partially or entirely substituted by one or more halogen atoms, or the constituent -CH2- may be substituted by an oxygen atom, or R1 and R2 may be coupled together to form an aliphatic hydrocarbon ring; R3 represents a linear, branched or cyclic C1-10 alkyl group or a C1-15 acyl or alkoxycarbonyl group in which hydrogen atoms on one or more constituent carbon atoms thereof may be partially or entirely substituted by one or more halogen atoms; X represents CH2, oxygen or sulfur; k stands for 0 or 1; and m stands for an integer of 0 to 5; and a polymer compound having recurring units available therefrom.
申请公布号 US2003050398(A1) 申请公布日期 2003.03.13
申请号 US20020189706 申请日期 2002.07.03
申请人 HASEGAWA KOJI;KINSHO TAKESHI;WATANABE TAKERU 发明人 HASEGAWA KOJI;KINSHO TAKESHI;WATANABE TAKERU
分类号 C08F34/00;C08G61/12;G03F7/039;(IPC1-7):C08F8/00 主分类号 C08F34/00
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