| 摘要 |
<p>A method for treating an organosiloxane coating which comprises a step of transporting a substrate (W) having a coating of a polysiloxane-based liquid chemical applied thereon into a reaction vessel (1), wherein the liquid chemical comprises a bonding between a silicon atom and a functional group selected from among a methyl group, a phenyl group and a vinyl group, and a step of subjecting the substrate (W) to a heat treatment in the reaction vessel (1) to form a film, wherein the heat treatment is carried out in a treating atmosphere containing a catalyst gas comprising ammonia and water at a treating temperature of 300 to 400˚C.</p> |
