PROCESS AND APPARATUS FOR ORGANIC VAPOR JET DEPOSITION

摘要

A method of fabricating an organic film is provided. A non-reactive carrier gas is used to transport an organic vapor. The organic vapor is ejected through a nozzle block (940) onto a cooled substrate (950), to form a patterned organic film (960). A device for carrying out the method is also provided. The device includes a source of organic vapors, a source of carrier gas and a vacuum chamber. A heated nozzle block (940) attached to the source of organic vapors and the source of carrier gas has at least one nozzle adapted to eject carrier gas and organic vapors onto a cooled substrate (950) disposed within the vacuum chamber .