发明名称 Detection devices, methods and systems for gas phase materials
摘要 Sensor arrays, methods, and systems for detecting the presence of gas phase materials by the formation of films based on the gas phase material are disclosed. The gas phase materials preferentially deposit conductive films on receptor materials that can be detected. The invention may also provide for increased sensitivity to the deposition of conductive materials through the use of closely spaced conductive electrodes interconnected by lines of receptor material. Examples of gas phase materials that may be detected include RuO4, IrO4 and RhO4.
申请公布号 US2003049856(A1) 申请公布日期 2003.03.13
申请号 US20020266797 申请日期 2002.10.08
申请人 MICRON TECHNOLOGY, INC. 发明人 SANDHU GURTEJ S.
分类号 G01N27/04;G01N27/07;(IPC1-7):G01N27/00 主分类号 G01N27/04
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