摘要 |
The invention relates to an interferometric measuring device (1) for measuring the shape of a surface of an object (O), with a radiation source (LQ) that emits a short coherence radiation, a beam splitter (ST) for producing an object beam (OS), which is guided along an object light path to the object (O), and a reference beam (RS), which is guided along a reference light path to a reflective reference plane (RSP), and with an image recorder (BA) that records the radiation, which is reflected by the object (O) and the reference plane (RSP) and is brought into interference, and supplies it to an evaluation device to determine the surface shape. A favorable adaptability and operation, even in measuring locations that are difficult to access is achieved by virtue of the fact that a lens system (SO), which is fixed in relation to the object (O), is disposed in the object light path and that the fixed lens system (SO) is followed by a lens system (BO) that can move in the direction of its optical axis.
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