To measure the depth of cut drillings/grooves in a substrate surface, during engraving, an electromagnetic beam is passed through a diaphragm opening and its direction is changed by an optical unit for an optical detector

摘要

To measure the depth of cut drillings and grooves at a substrate (1) surface, during engraving, an electromagnetic beam is registered through at least one opening in an optical diaphragm. At least one refractive and/or reflective optical unit (3) is between the opening (2') and the optical detector (4) in the path of the electromagnetic beam (S). To measure the depth of cut drillings and grooves at a substrate (1) surface, during engraving, an electromagnetic beam is registered through at least one opening in an optical diaphragm. At least one refractive and/or reflective optical unit (3) is between the opening (2') and the optical detector (4) in the path of the electromagnetic beam (S). It gives at least a double refraction or a single reflection to alter the beam direction. The optical unit can be flat parallel plates, wedge plates, prisms, cylinder lenses or beam dividers.