Process and calibration device for testing semiconductor wafers automatically uses calibrating wafer to calibrate the device before inserting wafer to be tested

摘要

A process for testing wafers in a test machine which can be calibrated automatically places a calibrating wafer (107) in the machine, calibrates it by means of a control unit and then inserts the wafer to be tested into the calibrated machine. An Independent claim is also included for a calibrating wafer for the above process.