发明名称 |
Structural design and processes to control probe position accuracy in a wafer test probe assembly |
摘要 |
The present invention is directed to a structure comprising a substrate having a surface; a plurality of elongated electrical conductors extending away from the surface; each of said elongated electrical conductors having a first end affixed to the surface and a second end projecting away from the surface; there being a plurality of second ends; and a means for positioning and maintaining the plurality of the second ends in substantially fixed positions with respect to each other. The structure is useful as a probe for testing and burning in integrated circuit chips at the wafer level.
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申请公布号 |
US2003048108(A1) |
申请公布日期 |
2003.03.13 |
申请号 |
US20020145661 |
申请日期 |
2002.05.14 |
申请人 |
BEAMAN BRIAN SAMUEL;DOANY FUAD ELIAS;FOGEL KEITH EDWARD;HEDRICK JAMES LUPTON;LAURO PAUL ALFRED;NORCOTT MAURICS HEATHCOTE;RITSKO JOHN JAMES;PAEK SANG-HYON;SHI LEATHEN;SHIH DA-YUAN;WALKER GEORGE FREDERICK |
发明人 |
BEAMAN BRIAN SAMUEL;DOANY FUAD ELIAS;FOGEL KEITH EDWARD;HEDRICK JAMES LUPTON;LAURO PAUL ALFRED;NORCOTT MAURICS HEATHCOTE;RITSKO JOHN JAMES;PAEK SANG-HYON;SHI LEATHEN;SHIH DA-YUAN;WALKER GEORGE FREDERICK |
分类号 |
B23K20/00;G01R1/067;G01R1/073;G01R3/00;G01R31/28;G06F9/44;G06F11/36;H01B3/46;H01L21/00;H01L21/48;H01L21/60;H01L21/607;H01L21/66;H01R13/24;H01R43/02;H05K3/32;H05K3/40;(IPC1-7):G01R31/02 |
主分类号 |
B23K20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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