发明名称 |
HEAT TREATMENT DEVICE, AND HEAT TREATMENT METHOD |
摘要 |
A heat treatment device comprising a treatment vessel (28), and a work boat (30) disposed in the treatment vessel (28) to support works (W) in multiple stages. When an operator inputs desired job identification symbols (J1−Jh) from an input operation unit (18), etc., a layout program and a process program are read from a layout storage unit (16) and a process storage unit (14), respectively, via a job recipe specified by these job identification symbols, and these programs are successively executed in the order of the time series indicated in the job recipe. Various kinds of combination of the layout programs and the process programs can be selected only by selecting the job identification symbols thereby.
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申请公布号 |
WO03021647(A1) |
申请公布日期 |
2003.03.13 |
申请号 |
WO2002JP08988 |
申请日期 |
2002.09.04 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
TAKAHASHI, AKIRA;KAWAMURA, KAZUHIRO |
分类号 |
H01L21/22;C23C16/52;H01L21/00;H01L21/02;H01L21/205;(IPC1-7):H01L21/02;H01L21/68 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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