发明名称 |
Manufacturing method of stamper for optical information medium, photoresist master therefor, stamper for optical information medium and optical information medium |
摘要 |
<p>A manufacturing method of a stamper for optical information medium comprises forming a photoresist layer on a substrate, irradiating the photoresist layer with laser beam to form a latent image thereon, developing the latent image so that a protrusion/depression pattern is formed to produce a photoresist master, and then transferring the protrusion/depression pattern to a metal film, wherein a photoresist master having an organic material layer provided in contact with the photoresist layer between the substrate and the photoresist layer is used.</p> |
申请公布号 |
EP1291859(A2) |
申请公布日期 |
2003.03.12 |
申请号 |
EP20020020081 |
申请日期 |
2002.09.06 |
申请人 |
TDK CORPORATION |
发明人 |
OYAKE, HISAJI;TAKAHATA, HIROAKI |
分类号 |
G03C1/494;G03C1/492;G03C1/76;G03C5/00;G03F7/00;G11B3/70;G11B5/84;G11B7/24;G11B7/26;(IPC1-7):G11B7/26 |
主分类号 |
G03C1/494 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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