| 摘要 |
<p>The present invention is directed to a wafer stepper library (110, 120) in which the reticle boxes (130, 140) are machine-scannable to allow automatic location of the desired reticle for a particular wafer lot operation. To accomplish this, the wafer stepper (100) includes a plurality of indicia reading devices (152, 162) aligned with at least some of the slots (112, 122) of the library (110, 120). Each reticle box (130, 140), in turn, may be provided with an indicia (132, 142) indicative of its reticle number. <IMAGE></p> |
