发明名称 |
METHOD OF MANUFACTURING INK-JET RECORD HEAD |
摘要 |
<p>A method of producing an ink-jet recording head using ion milling is provided. The method includes the steps of forming a piezoelectric layer subsequent to an electrode layer on a substrate by using a thin-film deposition technology, forming an energy-generating element for generating energy for ink ejection by etching the electrode layer and the piezoelectric layer simultaneously by ion milling, and removing a fence formed by deposits of mixed fine powders including those etched off the electrode layer and the piezoelectric layer. <IMAGE></p> |
申请公布号 |
EP1258357(A4) |
申请公布日期 |
2003.03.12 |
申请号 |
EP19990961351 |
申请日期 |
1999.12.24 |
申请人 |
FUJITSU LIMITED |
发明人 |
KOIKE, SHUJI;SAKAMOTO, YOSHIAKI;SHINGAI, TOMOHISA;OTANI, SEIGEN;OSADA, TOSHIHIKO;KURIHARA, KAZUAKI |
分类号 |
B41J2/16;(IPC1-7):B41J2/16;B41J2/055;B41J2/045 |
主分类号 |
B41J2/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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