| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method simple and precise compared with a conventional edge-detection method, without using a concentration pattern matching method, in a device and a method for inspecting a notch of a measured object. SOLUTION: This device is provided with a detection line setting means 31 for setting a detection line on an edge in a position where a notch of the measured object exists, an edge detecting means 32 for calculating an existence degree of the edge along the detection line set by the detection line setting means 31 and for comparing the existence degree of the edge with a prescribed judge-determination value to detect the presence of the edge, a notch judge- determination means 33 for judge-determining the presence of the notch in a position where the notch is to exist, based on the presence of the edge detected by the edge detection means 32, and a direction judge-determination means 34 for judge-determining whether the measured object is arranged along a correct direction or not, based on a determination result by the notch judge- determining means 33. |
