发明名称 |
MULTILAYER FILM REFLECTOR, MANUFACTURING METHOD THEREOF, SOFT X-RAY EXPOSING DEVICE, AND SOFT X-RAY OPTICAL SYSTEM |
摘要 |
PROBLEM TO BE SOLVED: To provide a multiplayer film reflector corrected in the surface shape of multiplayer films by controlling the layer number of multiplayer films without damaging the multiplayer films, a manufacturing method thereof, and a soft X-ray exposing device and soft X-ray optical system equipped with the multiplayer reflector. SOLUTION: In this manufacturing method of multiplayer film reflector, the multiplayer film reflector is formed by forming a multiplayer film 2 comprising at least two kinds of materials differed in refractive index alternately laminated in a prescribed periodic length on a substrate 1, and a multiplayer film 3 having a periodic length substantially equal to the multiplayer film 2 is laminated in a desired range on the multiplayer film 2, thereby, the phase of reflecting wave surface of the multiplayer film reflector is corrected. |
申请公布号 |
JP2003075591(A) |
申请公布日期 |
2003.03.12 |
申请号 |
JP20010268322 |
申请日期 |
2001.09.05 |
申请人 |
NIKON CORP |
发明人 |
ISHIYAMA WAKANA;YAMAMOTO MASAKI |
分类号 |
G21K1/06;B32B7/02;G02B5/08;G02B5/10;G02B5/26;G02B5/28;G03F7/20;H01L21/027;(IPC1-7):G21K1/06 |
主分类号 |
G21K1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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