| 发明名称 |
DEVICE FOR DETECTING CHEMICAL SUBSTANCE AND METHOD FOR MEASURING CONCENTRATION OF CHEMICAL SUBSTANCE |
| 摘要 |
<p>A vacuum ultraviolet ray generating unit (5) which generates vacuum ultraviolet rays used for ionizing a sample gas Gs in an ionization chamber (1) and a mass spectrometry unit (6) which accelerates the sample gas Gsi ionized by vacuum ultraviolet rays so as to measure the flight time of the accelerated substance.</p> |
| 申请公布号 |
EP1291651(A1) |
申请公布日期 |
2003.03.12 |
| 申请号 |
EP20010941037 |
申请日期 |
2001.06.13 |
| 申请人 |
MITSUBISHI HEAVY INDUSTRIES, LTD. |
发明人 |
DANNO, MINORU;YAMAKOSHI, HIDEO;KOSHI, MITSUO |
| 分类号 |
G01N27/64;H01J49/04;H01J49/10;H01J49/16;H01J49/40;(IPC1-7):G01N27/64 |
主分类号 |
G01N27/64 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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