| 摘要 |
PROBLEM TO BE SOLVED: To provide a new structure, which can impart magnetic anisotropy to a magnetic film, without forming a texture thereon. SOLUTION: This apparatus has a direction regulating tool 391 installed between a target 30 and a substrate 9, for giving the magnetic anisotropy to the magnetic film, by selectively passing particles emitted from the target 30 by sputtering, in a chamber 1 for forming a base film as a magnetic recording layer to be precedently formed beneath the magnetic film. The direction regulating tool 391 is composed of several blade plates 392 radially extending from a center axis A coaxial with the substrate 9, and forms a sputtered particles- passing port having a profile which is long in a radial direction of the substrate 9 and opened at one placed. The several blade plates 392 are installed at every equal angle of 45 degree or smaller. The tool 391 rotates around the center axis A, while the substrate 9 stands still. The several targets 30 are provided in such a manner that the centers are located at every equal distance on the periphery coaxial with the substrate 9, and rotates around the rotating shaft coaxial with the center axis A, with respect to the stationary substrate 9.
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