| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe capable of reducing the size of a circuit and of reducing the cost thereof. SOLUTION: This probe 2 is provided with a fine movement mechanism 160 for slightly displacing a sensor 110, a rough movement mechanism 150 for largely displacing the sensor 110, and a fine movement mechanism control means 20 and a rough movement mechanism control means 30 for controlling the mechanism 160 and the mechanism 150, respectively. The probe is so structured that the operation of the mechanism 150 is digitally controlled by the control means 30. Accordingly, the control means 30 can be constituted of one chip by utilizing a commercial FPGA (Field Programmable Gate Array), so that the size of the circuit can be reduced and the cost thereof can be reduced.
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