| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a sputtering target with fine crystal grains. SOLUTION: This method is characterized by manufacturing an ingot of Al or an Al alloy having a one-direction solidification structure, by applying continuous reversal oscillation or intermittent normal-rotation oscillation to a mold, which gives the mold horizontal rotation oscillation having an acceleration angle of the maximum angle of 5πrad/sec<2> or more and a rotation angle of 45 degrees or higher, while solidifying a molten metal in the mold sequentially from the lower part to the upper part, cold plastic working the obtained ingot of Al or the Al alloy having the one-direction solidification structure, along a parallel direction to a solidified direction of the one-direction solidification structure, thermally recrystallizing it, and subsequently cutting it into a predetermined shape and dimension.
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