发明名称 METHOD AND DEVICE FOR MANUFACTURING LIQUID CRYSTAL PANEL
摘要 PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a liquid crystal panel by which the liquid crystal panel with constant cell thickness can stably be obtained. SOLUTION: A substrate sticking device 300 is provided with a spectrometer 140, and the spectrometer 140 monitors the cell thickness of the 1st glass substrate 311 and 2nd glass substrate 312 when they are stuck together under reduced pressure. According to the monitoring result, a controller 130 computes the pressure reduction state in substrate sticking for obtaining desired cell thickness when the two stuck glass substrates are put back under atmospheric pressure and the pressure in a treating chamber 103 during the substrate sticking is adjusted. Consequently, the sticking is carried out under properly reduced pressure in a next substrate sticking process.
申请公布号 JP2003075845(A) 申请公布日期 2003.03.12
申请号 JP20010264654 申请日期 2001.08.31
申请人 SEIKO EPSON CORP 发明人 NAKATANI TOSHIYUKI;KUROIWA MASAHIRO
分类号 G02F1/13;G02F1/1339;(IPC1-7):G02F1/133 主分类号 G02F1/13
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