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发明名称
SELF TEACHING ROBOTIC CARRIER HANDLING SYSTEM
摘要
申请公布号
EP1290452(A1)
申请公布日期
2003.03.12
申请号
EP20010939753
申请日期
2001.05.30
申请人
BERKELEY PROCESS CONTROL, INC.
发明人
SAGUES, PAUL;WIGGERS, ROBERT, T.;HARDING, NATHAN, H.;AGGARWAL, SANJAY, K.
分类号
B25J9/10;H01L21/00;B25J9/18;B25J9/22;H01L21/677;(IPC1-7):G01R1/04
主分类号
B25J9/10
代理机构
代理人
主权项
地址
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