| 摘要 |
PROBLEM TO BE SOLVED: To reduce a cost by commonly using a plurality of gas lines, to implement compactness by reducing the number of the gas lines, and to facilitate expansion of gas kinds. SOLUTION: In this fluid controller 11, the single-system fluid supply line 13 is provided with a flow controller 13g, a pressure control system area 14 is provided on the upstream side of the flow controller 13g, the single-system line 13 of the pressure control system area 14 is connected with a plurality of fluid supply sources A, B, C, and a nearly L-shaped extension line 15 extended on this side in a view from the front of the single-system line 13 of the pressure control system area 14 is provided to coaxially configure the single-system line 13. The extension line 15 is formed with a plurality of fluid supply ports 16a, 16b, 16c connected to the fluid supply sources A, B, C.
|
