A METHOD OF COATING EDGES WITH DIAMOND-LIKE CARBON

摘要

A method of creating a diamond-like carbon film on a substrate, including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5x1010 per cm3 and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment.