LIQUID SEALING TYPE ACTIVE VIBRATION ISOLATOR

摘要

PROBLEM TO BE SOLVED: To provide a new-structure liquid sealing type active vibration isolator improving a target active vibration isolation effect by efficiently generating an air pressure fluctuation in an operation air chamber at a large fluctuation width, while suppressing the generation of a secondary frequency components of higher harmonic components. SOLUTION: An inlet and an outlet of a vacuum pump 8 are connected to the operation air chamber 44 via valve means 84 respectively, and a negative pressure generated in the inlet side of the vacuum pump 78 and a positive pressure generated in the outlet side are selectively applied to the operation air chamber 44 based on the switching operation of the valve means 84. The pressure fluctuation from the positive pressure side to the negative pressure side including an atmospheric pressure in between is applied to the operation air chamber 44 by efficiently using the output of the vacuum pump 78.