METHOD FOR MANUFACTURING PHASE MASK FOR PROCESSING OPTICAL FIBER, PHASE MASK FOR PROCESSING OPTICAL FIBER, OPTICAL FIBER WITH BRAGG GRATING, AND DISPERSION COMPENSATION DEVICE USING THE OPTICAL FIBER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a phase mask for processing an optical fiber on which the dispersion of pitch and the error of connection are less. SOLUTION: In the method for manufacturing the chirp phase mask by forming recessed grooves in a grating state on one surface of a quartz substrate and using the grooves as a grating pattern for processing an optical fiber, the pattern forming data prepared by arranging a plurality of the data of a repeated pattern of recessed grooves and protruding ridges while modulating the pitches of repetition and by integrating all data is used in an exposure process. An electron beam resist is applied on the phase mask blank and the pattern is formed all over the pattern forming region of the phase mask blank continuously in the direction perpendicular to the recess grooves in a grating state.