| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum valve structured to reduce dust produced from a vacuum seal and to suppress the scatter of dust, and its operating method. SOLUTION: This vacuum valve is provided with a first valve element 3 of plate shape controlled to move following opening/closing operation; a second valve element 4 disposed between the first valve element 3 and a valve seat 9 and driven interlocked with the first valve element 3; a first seal 5 provided on the second valve element 4 side face of the first valve element 3; a second seal 6 provided on the valve seat 9 side face of the second valve element 4; an adjusting means for adjusting the motion of the second valve element 4 to the first valve element 3 so that the first valve element 3 is released from the second valve element 4 in the state of maintaining the contact state of the valve seat 9 and second valve element 4 in a first stage when the first valve element 3 is operated to open and to release the second valve element 4 from the valve seat 9 in a following second stage; and a ventilating part 4b provided at the center part of the second valve element 4. It is preferable to provide the ventilating part 4b with a dust filter 4c.
|
