| 摘要 |
PROBLEM TO BE SOLVED: To provide a spring and its manufacturing method capable of pushing an object by a large spring load when being used as a contact probe. SOLUTION: The spring is formed of a material including, at least, one of silicon-carbon and silicon-nitrogen. Preferably, its shape is a fixed planar pattern having a thickness. More preferably, the surface is covered with a covered metal. More preferably, the covered metal is a metal including Au, Pd, Pt, or Rh. It may be covered with carbon as a substitute for the covered metal. The spring is so formed that, for example, a aluminum film 27 is formed on a desired silicon base material substrate 21 as a desired pattern metal layer, the substrate 21 is etched with the metal layer used as a mask, and then the metal layer is removed.
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