发明名称 ETCHING APPARATUS AND ETCHING SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for uniformly etching an object to be etched such as a circuit board, while moving it, and provide an etching system. SOLUTION: The etching apparatus 1 comprises a carrier 3 for horizontally carrying the object to be etched in a state of mounting it thereon, a nozzle part 6 for an etchant arranged under the carrier 3, and a seal 8 for sealing the top surface of the object against the etchant, while moving at the same speed as the moving object mounted on the carrier 3, and is characterized by forming a liquid passing part 3a on the carrier 3, for passing the sprayed etchant at the nozzle part 6, to the object side.
申请公布号 JP2003073861(A) 申请公布日期 2003.03.12
申请号 JP20010264162 申请日期 2001.08.31
申请人 FUJI KIKO:KK 发明人 SATO HIDEO
分类号 C23F1/08;H05K3/06;(IPC1-7):C23F1/08 主分类号 C23F1/08
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