| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder for evaluating a film, which can evaluate the defect density in a formed film on a large-scale substrate containing a sodium content, such as soda glass, and provide a method for evaluating film. SOLUTION: The substrate holder has several portions 2 for mounting substrates on a metallic plate body 1, and inlays quartz substrates 2a as non- alkali substrates in them. The quartz substrates 2a are fixed with fixing members 3 and 4, which are installed on the both sides of the plate body 1, and are made to be removable. The corners of each fixing member 3 provided on the surface side to be film formed are chamfered, and each fixing member 4 installed on the opposite side is composed of thin SUS foils, or the like. The plate body 1 comprises slits formed on the edge to prevent the camber of it.
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