| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation system capable of prolonging the service life and improving productivity. SOLUTION: This evacuation system has an exhaust pump system 2 having a plurality of monitoring bands, sensors 101, 102, 103, 104 respectively provided in the monitoring bands for independently detecting the state of the exhaust pump system 2 in the monitoring bands, heaters 201, 202, 203, 204 respectively provided in the monitoring bands, and a monitoring and control device 1 for receiving the respective data signals D1 , D2 , D3 , Dm from the sensors 101, 102, 103, 104, comparing the data signal with a threshold, and selectively supplying power for heating only to the heater of the monitoring band in which a specified sensor is disposed when the data signal from the specified sensor exceeds the threshold.
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