| 摘要 |
A bubble-jet type ink-jet printhead and manufacturing method thereof are provided. The bubble-jet type ink-jet printhead includes a substrate (110) integrally having an ink supply manifold (112), an ink chamber (114), and an ink channel (116). A nozzle plate (120) having a nozzle (122) is stacked on the substrate. A heater (130) formed in an annular shape and centered around the nozzle and an electrode (150) for applying current to the heater are formed on the nozzle plate. An adiabatic layer (160) is formed on the heater for preventing heat generated by the heater from being conducted upward from the heater. Alternatively, a bubble-jet type ink-jet printhead may be formed on a silicon-on-insulator (SOI) wafer having a first substrate, an oxide layer, and a second substrate stacked thereon. The first substrate integrally has a manifold, an ink chamber, and an ink channel. A nozzle is formed in the oxide layer and the second substrate. An adiabatic barrier is formed on the second substrate by limiting a portion of the second substrate in the shape of an annulus for forming an annular heater centered around the nozzle. In the bubble-jet type ink-jet printhead and manufacturing method thereof, the adiabatic layer or the adiabatic barrier is provided to transmit most of the heat generated by the heater to ink under the heater, thereby increasing energy efficiency. <IMAGE> |
