发明名称 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus |
摘要 |
A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing <IMAGE> |
申请公布号 |
EP1052552(A3) |
申请公布日期 |
2003.03.12 |
申请号 |
EP20000303219 |
申请日期 |
2000.04.17 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
BISSCHOPS, THEODORUS HUBERTUS JOSEPHUS;VIJFVINKEL, JAKOB;SOEMERS, HERMANUS MATHIAS JOANNES RENE;DRIESSEN, JOHANNES CORNELIS;RENKENS, MICHAEL JOZEFA MATHIJS;BOUWER, ADRIANUS GERARDUS |
分类号 |
G03F7/20;(IPC1-7):G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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