HIGH-PRESSURE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To realize a high-pressure treatment apparatus having a double- structured chamber to the inner chamber of which high pressure withstanding strength is unnecessary. SOLUTION: A substrate 103 is placed in the inner chamber 102 of the double- structured chamber 100 and cleaned by a supercritical fluid in which a liquid chemical to be supplied from a liquid chemical tank 170 is mixed. Another supercritical fluid containing no liquid chemical is supplied to the gap region between an outer chamber 101 and the chamber 102. A communication port 106 is formed on the wall of the chamber 102 so that the supercritical fluid can be made to pass through the port 106 freely between the chamber 102 and the gap region. The pressure of the gap region and that of the chamber 102 to be detected by the first and second pressure detectors 230 and 240 are adjusted by the first and second pressure adjusting valves 210 and 220 under the control of a pressure controlling part 200.