发明名称 Process for producing a light-emitting and/or a light-receiving semiconductor body
摘要 A light-emitting and/or light-receiving semiconductor body is produced with one or more semiconductor layers composed of GaAsxP1-x, where 0<=x<1. At least a portion of the surface of the semiconductor layer is first treated with an etching solution H2SO4:H2O2:H2O in a first etching step and then with hydrofluoric acid in a second etching step. The etching results in a surface roughness on the treated portion of the surface of the semiconductor layer.
申请公布号 US6531405(B1) 申请公布日期 2003.03.11
申请号 US19990250877 申请日期 1999.02.16
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 WEGLEITER WALTER;NIRSCHL ERNST;FISCHER HELMUT
分类号 H01L31/02;H01L31/0236;H01L33/02;(IPC1-7):H01L21/302 主分类号 H01L31/02
代理机构 代理人
主权项
地址