发明名称 |
Process for producing a light-emitting and/or a light-receiving semiconductor body |
摘要 |
A light-emitting and/or light-receiving semiconductor body is produced with one or more semiconductor layers composed of GaAsxP1-x, where 0<=x<1. At least a portion of the surface of the semiconductor layer is first treated with an etching solution H2SO4:H2O2:H2O in a first etching step and then with hydrofluoric acid in a second etching step. The etching results in a surface roughness on the treated portion of the surface of the semiconductor layer.
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申请公布号 |
US6531405(B1) |
申请公布日期 |
2003.03.11 |
申请号 |
US19990250877 |
申请日期 |
1999.02.16 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
WEGLEITER WALTER;NIRSCHL ERNST;FISCHER HELMUT |
分类号 |
H01L31/02;H01L31/0236;H01L33/02;(IPC1-7):H01L21/302 |
主分类号 |
H01L31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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