发明名称 |
Substrate processing pallet and related substrate processing method and machine |
摘要 |
A substrate processing pallet has a top surface and a plurality of side surfaces. The top surface has at least one recess adapted to receive a substrate. The recess includes a support structure adapted to contact a portion of a substrate seated in the recess and a plurality of apertures each adapted to accommodate a lift pin. Lift pins can extend through the apertures initially to support the substrate and retract to deposit the substrate onto the support structure. A side surface includes a process positioning feature adapted to engage with a feature located in a process chamber to position the pallet. A side surface includes a positioning feature adapted to engage with an end effector alignment feature to position the pallet with respect to the end effector during transport. A side surface includes support features adapted to engage with end effector support features to support the pallet during transport.
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申请公布号 |
US6530733(B2) |
申请公布日期 |
2003.03.11 |
申请号 |
US20010917223 |
申请日期 |
2001.07.27 |
申请人 |
NEXX SYSTEMS PACKAGING, LLC |
发明人 |
KLEIN MARTIN P.;FELSENTHAL DAVID;SFERLAZZO PIERO |
分类号 |
B65G49/07;C23C14/50;H01L21/673;H01L21/68;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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