发明名称 Methods for cleaning surfaces substantially free of contaminants
摘要 A cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants has a resiliently mounted nozzle for spraying a cryogenic cleaning medium on the surface. The nozzle is driven in an oscillatory manner at a predetermined amplitude and frequency so the nozzle spray is delivered in a manner to provide pulsing of the spray and to provide as "snow plow" effect on contaminants as the spray delivers the cleaning medium against the surface. The surface is transported past the nozzle, and the cleaning occurs in an enclosed controlled environment.
申请公布号 US6530823(B1) 申请公布日期 2003.03.11
申请号 US20000636265 申请日期 2000.08.10
申请人 NANOCLEAN TECHNOLOGIES INC 发明人 AHMADI GOODARZ;LEWIS PAUL E.;TANNOUS ADEL GEORGE;MAKHAMREH KHALID;COMPTON KEITH H.
分类号 B08B3/02;B08B7/00;B24C1/00;B24C3/22;B24C3/32;G02F1/1333;H01L21/00;(IPC1-7):B24B1/00 主分类号 B08B3/02
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