Semiconductor apparatus, method of fabricating thereof, fabricating apparatus, circuit board, and electronic device

摘要

Thermal oxidation of lead frames is provided to thereby improve the adhesion with resin. The method includes the steps of disposing a lead frame having die pads on which semiconductor chips are respectively mounted in a bonding apparatus, and wire-bonding electrodes of the semiconductor chips and leads of the lead frame. The bonding apparatus includes a bonding stage and a stand-by stage. A heat section is provided in the bonding stage. The die pad of the lead frame is disposed in the bonding stage and the remaining die pads are disposed in the stand-by stage. The die pads disposed in the stand-by stage are placed in a non-contact state with the heat section, while the die pad disposed in the bonding stage is brought in contact with the heat section to be heated and wire-bonded.