Method for forming incompletely landed via with attenuated contact resistance

摘要

A method for forming a via through a dielectric layer. There is first provided a substrate. There is then formed over the substrate a patterned conductor layer. There is then formed covering the patterned conductor layer a dielectric layer. There is then formed through the dielectric layer a via to access the patterned conductor layer, where the via is incompletely landed upon the patterned conductor layer. There is then purged the via while employing a vacuum purging method to form a purged via. There is then passivated the purged via and passivated the patterned conductor layer exposed within the purged via while employing a plasma passivation method to form a plasma passivated purged via and a plasma passivated patterned conductor layer. Finally, there is then formed into the plasma passivated purged via a conductor stud layer. Incident to employing the purging of the via to form the purged via and the plasma passivating of the purged via to form the plasma passivated purged via, the conductor stud layer when formed into the plasma passivated purged via is formed with attenuated contact resistance with respect to the plasma passivated patterned conductor layer.