发明名称 |
Robot alignment system and method |
摘要 |
A robot alignment system (10) includes a sensor system (12). The sensor system (12) is designed to attach to an end effector of a robot arm (14). A rough alignment target (16) is attached to a work station. A fine alignment target (22) is placed on a work surface of the work station. The sensor system (12) first determines the rough alignment target (16). The robot arm (14) is then moved to detect the fine alignment target (22).
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申请公布号 |
US6532403(B2) |
申请公布日期 |
2003.03.11 |
申请号 |
US20010837878 |
申请日期 |
2001.04.18 |
申请人 |
MICROTOOL, INC |
发明人 |
BECKHART GORDON HAGGOTT;CONARRO PATRICK ROONEY;HARRELL KEVIN JAMES;KRAUSE MICHAEL CHARLES;FARIVAR-SADRI KAMRAN MICHAEL |
分类号 |
B25J9/16;B25J9/18;H01L21/00;H01L21/687;(IPC1-7):G05B19/04;G05B19/18 |
主分类号 |
B25J9/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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