发明名称 Robot alignment system and method
摘要 A robot alignment system (10) includes a sensor system (12). The sensor system (12) is designed to attach to an end effector of a robot arm (14). A rough alignment target (16) is attached to a work station. A fine alignment target (22) is placed on a work surface of the work station. The sensor system (12) first determines the rough alignment target (16). The robot arm (14) is then moved to detect the fine alignment target (22).
申请公布号 US6532403(B2) 申请公布日期 2003.03.11
申请号 US20010837878 申请日期 2001.04.18
申请人 MICROTOOL, INC 发明人 BECKHART GORDON HAGGOTT;CONARRO PATRICK ROONEY;HARRELL KEVIN JAMES;KRAUSE MICHAEL CHARLES;FARIVAR-SADRI KAMRAN MICHAEL
分类号 B25J9/16;B25J9/18;H01L21/00;H01L21/687;(IPC1-7):G05B19/04;G05B19/18 主分类号 B25J9/16
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