发明名称 |
Power supply with flux-controlled transformer |
摘要 |
There is provided by this invention an apparatus and method for generating voltage pulses to first and second magnetron devices in a plasma chamber. An isolation transformer is connected to a pulsed DC power supply having a flux sensor, such as a Hall effect sensor, in close proximity to its air gap to monitor the transformer flux. A control circuit is connected to the flux sensor to control the duty cycle of the transformer by controlling the flux of the transformer such that the maximum and minimum peak transformer fluxes are equal in magnitude and opposite in sign to prevent saturation.
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申请公布号 |
US6532161(B2) |
申请公布日期 |
2003.03.11 |
申请号 |
US20010890814 |
申请日期 |
2001.11.13 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
KOVALEVSKII DMITRI;KISHINEVSKY MICHAEL;CHRISTIE DAVID J. |
分类号 |
H01L21/3065;H01F19/08;H01F27/40;H01F30/06;H01J37/34;H02M1/40;H02M7/48;H02M9/02;(IPC1-7):H02M7/122 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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